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Software for imaging phase-shift interference microscope

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dc.contributor.author Malinovski, Igor
dc.contributor.author França, Ricardo dos Santos
dc.contributor.author Couceiro, Iakyra Borrakuens
dc.date.accessioned 2018-09-25T01:15:49Z
dc.date.available 2018-09-25T01:15:49Z
dc.date.issued 2017
dc.identifier.uri http://hdl.handle.net/2050011876/616
dc.description.abstract In recent years absolute interference microscope was created at National Metrology Institute of Brazil (INMETRO). The instrument by principle of operation is imaging phase-shifting interferometer (PSI) equipped with two stabilized lasers of different color as traceable reference wavelength sources. We report here some progress in development of the software for this instrument. The status of undergoing internal validation and verification of the software is also reported. In contrast with standard PSI method, different methodology of phase evaluation is applied. Therefore, instrument specific procedures for software validation and verification are adapted and discussed. pt_BR
dc.format.extent 4 f. pt_BR
dc.language.iso Inglês pt_BR
dc.subject.classification Metrologia científica e aplicada pt_BR
dc.subject.classification Tecnologia pt_BR
dc.subject.classification Metrologia física pt_BR
dc.subject.classification Metrologia pt_BR
dc.title Software for imaging phase-shift interference microscope pt_BR
dc.type Artigo pt_BR
bom.learningResourceType Artigo científico pt_BR
dc.mediator Instituto Nacional de Metrologia Qualidade e Tecnologia (INMETRO) pt_BR
dc.rights.type Termo de cessão SBM pt_BR
dc.subject.decs Ciência, tecnologia e inovação pt_BR
dc.subject.decs Tecnologia pt_BR
dc.subject.decs Metrologia pt_BR
dc.subject.decs Metrologia científica e aplicada pt_BR
dc.subject.decs Metrologia óptica pt_BR
dc.subject.decs Instrumento de medição pt_BR
dc.subject.decs Equipamento de verificação pt_BR
dc.subject.decs Medição pt_BR
dc.subject.decs Instrumento de medição pt_BR
dc.subject.decs Equipamento de verificação pt_BR
dc.subject.keyword Nanometrologia pt_BR
dc.subject.keyword Metrologia dimensional pt_BR
dc.subject.keyword Nanometrology pt_BR
dc.subject.keyword Dimensional metrology pt_BR
dc.subject.keyword Interference microscopy pt_BR
dc.subject.keyword Software pt_BR
dc.subject.keyword Phase shifting interferometry (PSI) pt_BR
dc.location.country Brasil pt_BR


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